Beschreibung
A Fully automatic Pressure Curing Oven with 300mm EFEM.
Anlagenmerkmale
- Oven Size (mm): 2,200[W] x 2,200[D] x 2,475[H]
- Chamber Usable Area (mm): 560[W] x 680[D] x 480[H]
- Max Operating Pressure: 20 bar (290 psi)
- Max Operating Temperature: 260⁰ C
- Nitrogen Enabled (option)
- Cleanroom Class 100 (option)
- Vacuum down to 5 Torr (option)
- Fully Automatic Loading with EFEM (300mm wafer)
